A semiconductor manufacturer
Loading & unloading of plastic wafer carriers
When using collaborative robots to transfer wafers in a clean room, the customer uses a 3D vision localisation system to determine the spatial coordinates of the wafer cassettes on the shelves or carts, and guides the collaborative robots to perform accurate gripping.
SOLUTION
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AT-S1000-06C-S
Binocular fringe grating 3D camera
The products are characterized by high precision, high beat rate. Lightweight and compact, with a high degree of intelligence and versatility, without the need for secondary development, it helps users to improve transit efficiency.
Precise positioning
The 3D vision system can acquire the six-dimensional spatial coordinates of the wafer carrier through quick scanning and guide the robot to accurately grasp it.
High efficiency
The structured light imaging scheme meets the requirement for millimetre-level comprehensive positioning accuracy, and the single positioning beat is <3s, which meets the requirement for material transfer efficiency.
Environmental adaptation
Plastic wafer carriers are available in a range of colours, and the blue light grid solution can cope with some cassette reflections and achieve full imaging under 60,000 lux illumination, with good environmental adaptability.
Easy to use
The system is easy to use, and the software can be used without programming. Daily only need appearance cleaning, fixing and other routine maintenance, service life of not less than 5 years.
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